Service

Economical Solution

For customers with spare assemblies, utilizing experienced Varian Semiconductor technicians enables an effective way to have assemblies built to specifications, tested, and qualified. This increases uptime and lowers costs.

Process Logistics

Spare assemblies are shipped to Varian Semiconductor by the customer though a “Return Authorization” form generated through the local office. The assembly is evaluated and an estimate of repair costs and lead time provided for customer approval before the work is completed.

Production Proven

Our replacement parts specifications, assembly procedures, and test methods have been validated in production systems to assure compatibility and optimal performance. Only Varian Semiconductor can assure that replacement parts meet our design, quality and materials specifications to assure the highest tool performance.